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ALESSANDRO DILIGENTI

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• Articolo in rivista

  1. A. Diligenti, A. Nannini, G. Pennelli, F. Pieri,Current transport in free standing porous silicon, APPLIED PHYSICS LETTERS,vol. 68,num. 5,pp 687,tot.pag 0,1996
  2. P. Bruschi, C. Ciofi, V. Dattilo, A. Diligenti, A. Nannini, B. Neri,Copper metallization for integrated circuits: TEM analysis and electrical characterization, JOURNAL OF ELECTRONIC MATERIALS,vol. 26,pp L17,tot.pag 0,1997
  3. Bruschi-P; Diligenti-A; Iani-F; Nannini-A; Piotto-M,Fabrication of a silicon-vacuum field-emission microdiode with a moving anode, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,vol. 16,pp 665,tot.pag 0,1998
  4. R. Bernardini, A. Diligenti, A. Nannini, M. Piotto,Free standing silicon micromachined resistors from 110 substrate, Alta Frequenza-Rivista di Elettronica,vol. 10,pp 60,tot.pag 0,1998
  5. P.Bruschi, A. Diligenti, A. Nannini, M. Piotto,Technology of integrable free-standing yttria-stabilized zirconia membranes, THIN SOLID FILMS,vol. 346,pp 251,tot.pag 4,1999
  6. P. Bruschi, A. Diligenti, A. Nannini, M. Piotto,Microsistemi per applicazioni spaziali, Alta Frequenza-Rivista di Elettronica,vol. 12,pp 75,tot.pag 0,2000
  7. A. Diligenti, A. Nannini, F. Pieri, M. Piotto, G. Noci,A micromachined xenon flow regulator for space applications, MICROELECTRONIC ENGINEERING,vol. 53,pp 565,tot.pag 0,2000
  8. P. Bruschi, A. Diligenti, M. Piotto,Micromachined silicon suspended wireswith submicrometric dimensions, MICROELECTRONIC ENGINEERING,vol. 57-58,pp 959,tot.pag 7,2001
  9. P. Bruschi, A. Diligenti, M. Piotto,Micromachined Gas Flow Regulator for Ion Propulsion Systems, IEEE TRANSACTIONS ON AEROSPACE AND ELECTRONIC SYSTEMS,vol. 38,num. 3,pp 982-988,tot.pag 7,2002
  10. A. Diligenti, M. Macucci, B. Pellegrini, M. Piotto,Fabrication and characterization of highly doped suspended silicon wires, MICROELECTRONIC ENGINEERING,vol. 67-68,pp 676-682,tot.pag 7,2003
  11. G. Barillaro, A. Diligenti, G. Marola, L. M. Strambini,A silicon crystalline resistor with an adsorbing porous layer as a gas sensor, SENSORS AND ACTUATORS B-CHEMICAL,vol. 105,num. 2,pp 278-282,tot.pag 5,2005
  12. G. Barillaro, A. Diligenti, A. Nannini, L. M. Strambini,Gas sensors based on silicon devices with a porous layer, Physica status solidi (C),vol. 9,pp 3424-3428,tot.pag 5,2005
  13. G. Barillaro, P. Bruschi, A. Diligenti, A. Nannini,Fabrication of regular silicon microstructures by photo-electrochemical etching of silicon, Physica status solidi (C),vol. 9,pp 3198-3202,tot.pag 5,2005
  14. G. Barillaro, A. Nannini, A. Diligenti, L. M. Strambini, E. Comini, G. Sberveglieri,Low-Concentration NO2 Detection With an Adsorption Porous, Sensors Journal, IEEE,vol. 6,num. 1,pp 19-23,tot.pag 5,2006
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  Articolo su rivista scientifica Index Medicus, Science Citation Index

  1. M. Allegrini, C. Ciofi, A. Diligenti, F. Fuso, A. Nannini, V. Pellegrini, G. Pennelli,Photoluminescence from ion-beam cosputtered Si/SiO_2 thin films, SOLID STATE COMMUNICATIONS,vol. 100,num. 6,pp 403,tot.pag 4,1996
  2. A. Diligenti, A. Nannini, G. Pennelli, V. Pellegrini, F. Fuso, M. Allegrini,Electrical characterization of metal Schottky contacts on luminescent porous silicon, THIN SOLID FILMS,vol. 276,num. 4,pp 179,tot.pag 4,1996
  3. S. Puccini, V. Pellegrini, M. Labardi, F. Fuso, M. Allegrini, A. Diligenti, A. Nannini, G. Pennelli,Red and blue-light emission from free-standing porous silicon, Nuovo Cimento della Società Italiana di Fisica. Sezione D: Condensed Matter, Atomic, Molecular and Chemical Physics, Fluids, Plasmas, Biophysics,vol. 18,num. 10,pp 1149,tot.pag 9,1996
  4. A. Diligenti, A. Nannini, G. Pennelli, F. Pieri, V. Pellegrini, F. Fuso, M. Allegrini,Current-Voltage Characteristics of Porous Silicon Structures, Nuovo Cimento della Società Italiana di Fisica. Sezione D: Condensed Matter, Atomic, Molecular and Chemical Physics, Fluids, Plasmas, Biophysics,vol. 18,num. 10,pp 1197,tot.pag 8,1996
  5. C. Ciofi, A. Diligenti, A. Nannini, G. Pennelli, N Vannucci, F. Fuso, M. Allegrini,Thin Films of Granular Silicon: Electrical, Structural and Optical Characterization, SOLID STATE PHENOMENA,vol. 54,num. 1,pp 109,tot.pag 10,1997
  6. A.Diligenti, F.Pieri, F.Piotto, F.Fuso, M.Allegrini,Blue photoluminescence from thermally grown SiO_2 on micromachined arrays of silicon planes, APPLIED PHYSICS LETTERS,vol. 75,num. 4,pp 489,tot.pag 3,1999
  7. G. Barillaro, A. Diligenti, F. Pieri, F. Fuso, M. Allegrini,Integrated porous-silicon light-emitting diodes: a fabrication process using graded doping profiles, APPLIED PHYSICS LETTERS,vol. 78,num. 26,pp 4154-4156,tot.pag 3,2001
  8. G. Barillaro, A. Diligenti, M. Piotto, M. Allegrini, Fuso and L. Pardi,Non Constant Anodization Current Effects on Spectra of Porous Silicon LEDs, MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,vol. 101,pp 266,tot.pag 269,2003
  9. G.Barillaro, A.Diligenti, A.Nannini, G.Pennelli,A thick silicon dioxide fabrication process based on electrochemical trenching, SENSORS AND ACTUATORS A-PHYSICAL,vol. 107,num. 3,pp 279-284,tot.pag 6,2003
  10. G. Barillaro, P. Bruschi, A. Diligenti, D. Navarrini,Determination of porous silicon growth profiles in the presence of non-uniform doping by means of a switching current method, PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,vol. 197,pp 132-136,tot.pag 5,2003
  11. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, Benedetti Mauro, Merlo Sabina,Silicon micromachined periodic structures for optical applications at 1.55 µm, APPLIED PHYSICS LETTERS,vol. 89,pp 151110,tot.pag 3,tot. autori 4,2006
  12. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, STRAMBINI LUCANOS MARSILIO,p+-n diodes with a lateral porous layer as gas sensors, PHYSICA STATUS SOLIDI. A: APPLIED RESEARCH (PRINT EDITION),vol. 204/5,pp 1399,tot.pag 5,2007
  13. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, STRAMBINI LUCANOS MARSILIO, Comini Elisabetta, Guido Faglia,NO2 adsorption effects on p+-n silicon junctions surrounded by a lateral porous layer, SENSORS & ACTUATORS B, CHEMICAL,vol. 134/2,pp 922,tot.pag 927,2008
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  Brevetti oggetto di valutazione

  1. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, Riva C., Campedelli R., Losa S.,Process for manufacturing microelectromechanical interaction systems for storage medium, USA,tot. autori 5,2007
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  Manuale

  1. DILIGENTI ALESSANDRO,Alessandro Diligenti, Appunti del corso DISPOSITIVI E TECNOLOGIE ELETTRONICHE, SEU Pisa 2007, pp.263,,2007
  2. DILIGENTI ALESSANDRO, PIERI FRANCESCO,Appunti del corso STRUMENTAZIONE E MISURE PER LA MICROELETTRONICA, SEU Pisa, pp. 152,,2007
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  Libro, manuale o trattato

  1. A. Diligenti,Microelettronica I, dispense,tot.pag. 0,1996
  2. C. Ciofi, A. Diligenti,Esercizi svolti di Microelettronica I,tot.pag. 0,1996
  3. C. Ciofi, A. Diligenti,Esercizi di Microelettronica I,tot.pag. 0,1998
  4. Alessandro Diligenti, Stefano Di Pascoli,Esercizi svolti di microelettronica I,tot.pag. 0,1999
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  Atti di convegni nazionale con revisori articolo in extenso

  1. G. Barillaro, A. Diligenti, A. Nannini, L. M. Strambini,Gas sensor based on a porous/crystalline silicon structure, AISEM 2004, pp 1-3, Ferrara,vol. 1,2004
  2. G. Barillaro, A. Diligenti, A. Nannini, L. M. Strambini,Fabrication and characterization of the APSFET, an adsorption porous silicon FET, AISEM 2004, pp 1-4, Ferrara,vol. 1,2004
  3. BARILLARO GIUSEPPE, Ciucci Sergio, DILIGENTI ALESSANDRO, PENNELLI GIOVANNI,High aspect ratio SiO2 microneedle array fabrication, 10th National Conference on Sensors and Microsystems, pp 461-465,2005
  4. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, STRAMBINI LUCANOS MARSILIO,Silicon p+n mesa junction with a porous layer as sensing element, 11th National Conference on Sensors and Microsystems, pp 33-37,2006
  5. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, Annovazzi-lodi V., Benedetti M., Merlo S.,Strutture periodiche in silicio microlavorato per applicazioni ottiche a lambda1.55µm, Fotonica 2007, 10° Convegno Nazionale sulle Tecniche Fotoniche nelle Telecomunicazioni, pp 229-232,2007
  6. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, STRAMBINI LUCANOS MARSILIO, Annovazzi-lodi Valerio, Benedetti Mauro, Merlo Sabina,Micromachined hybrid one-dimensional photonic crystals, 13th National Conference on Sensors and Microsystems, pp 406-415, Roma - Italy,2008
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  Articolo in atti di congresso

  1. P.Bruschi, A.Diligenti, and A.Nannini,Gas sensing with conducting polymer thin film resistors obtained from commercial photoresist patterns, 1st Italian Conference on Sensors and Microsystems, pp 69, Rpma,vol. 1,1996
  2. P. Bruschi, A. Diligenti, A. Nannini, F. Pieri, M. Piotto,A micromachined hotplate on a silicon oxide suspended membrane, 2nd Italian Conference on Sensors and Microsystems, pp 348, Roma,vol. 1,1997
  3. P. Bruschi, A. Diligenti, A. Nannini, F. Pieri, M. Piotto,A micromachined silicon field-effect diode with a moving anode, 2nd Italian Conference on Sensors and Microsystems, pp 353, Roma,vol. 1,1997
  4. Lucchetti-D; Bozzi-C; Dell'Orso-R; Messineo-A; Tonelli-G; Verdini-PG; Wheadon-R; Della-Marina-R; Weiss-P; Diligenti-A; Nannini-A,Diagnostic tools and characterisation techniques for large area integrated capacitors on high resistivity microstrip detectors, Proceedings of the Fifth International Symposium on High Purity Silicon V., pp 456, Pennington, NJ, USA,vol. 1,1998
  5. A. Diligenti, A. Nannini, F. Pieri, M. Piotto, G. Noci,An integrated xenon flow regulator obtained by means of micromachining, sensors and microsystems, pp 359, Roma,vol. 1,1999
  6. G. Barillaro, A. Diligenti, A. Nannini, F. Pieri,Organic vapours detection using an integrated porous silicon device, Eurosensors, pp 197, Copenhagen,vol. 1,2000
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  Atto di convegno internazionale con revisori articolo in extenso

  1. G. Barillaro, A. Diligenti, A. Nannini, L. M. Strambini,Gas sensors based on silicon devices with a porous layer, PSST2004, pp 324-325, valencia-Spagna,vol. 1,2004
  2. G. Barillaro, A. Nannini, A. Diligenti, L. M. Strambini, E. Comini, G.Sberveglieri,Detecting NO2 with APSFET, an adsorption porous silicon FET, IEEE SENSORS 2004, pp 1-4, Vienna, Austria,vol. 1,2004
  3. P. Bruschi, A. Diligenti, D. Navarrini, M. Piotto,A split heater integrated gas flow sensors for ultra low flow regimes, 18th European Conference on Solid-State Transducers (Eurosensors XVIII), pp 1-4, Rome, Italy,vol. 1,2004
  4. G. Barillaro, P. Bruschi, A. Diligenti, A. Nannini,Micromachining by electrochemical silicon etching: technology and applications, PSST 2004, pp 32-33, Valencia-Spagna,vol. 1,2004
  5. G. Barillaro, A. Diligenti, L. M. Strambini, E. Comini, G. Faglia,NO2 detection by means of an integrated silicon resistor with a porous adsorbing layer, EUROSENSORS XIX, pp MP14-1-MP14-4, Barcellona,vol. 1,2005
  6. G. Barillaro, A. Diligenti, L. M. Strambini, E. Comini, G. Faglia,FET-Like Silicon Sensor with a Porous Layer for NO2 Detection, Proceedings of IEEE Sensors 2005, pp 121-124, Irvine,vol. 1,2005
  7. G. Barillaro, A. Diligenti, F. Pieri, G. Pennelli,High aspect ratio silicon dioxide microneedles array fabrication, EUROSENSORS XIX, pp WPb17-1-WPb17-4, Barcellona,vol. 1,2005
  8. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, STRAMBINI LUCANOS MARSILIO,Silicon dioxide microneedles for transdermal drug delivery, IEEE Sensors 2008, pp 1104-1107, Lecce,2008
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  Atto di convegno internazionale con revisori articolo breve / poster

  1. G.Barillaro,P.Bruschi,A.Diligenti,D.Navarrini,Determination of the porous silicon growth profiles in the presence of non-uniform doping by means of a switching current method, Proceedings of PSST 2002, pp 1,vol. 1,2002
  2. A.Diligenti,M.Macucci,B.Pellegrini,M.Piotto,Fabrication and characterization of highly doped suspended silicon wires, Proceedings of Micro and Nanoengineering 2002 International Conference, September 16-19, pp 1, Lugano (Svizzera),vol. 1,2002
  3. G.Barillaro, A.Diligenti,M.Piotto,M.Allegrini,F.Fuso,L.Pardi,Non-constant anodization current effects on the electroluminescence spectra of porous silicon, Proceedings of E-MRS 2002 Spring Meeting, June 18-21, Strasbourg, pp 1-2, Strasbourg (France),vol. 1,2002
  4. PENNELLI GIOVANNI, Ciucci Sergio, D'angelo Fabrizio, DILIGENTI ALESSANDRO, PELLEGRINI BRUNO, Piotto Massimo,silicon nanowire fabricated by means of an underetchin technique, mne-2004, pp 276-277, Rotterdam,2004
  5. S. Ciucci, F. D' Angelo, A. Diligenti, B. Pellegrini, G. Pennelli, M. Piotto,Silicon nanowires fabricated by means of an underetching technique, Micro and Nano Engineering 2004, pp 1-3, Rotterdam, The Netherlands,vol. 1,2004
  6. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, STRAMBINI LUCANOS MARSILIO, Comini Elisabetta, Faglia Guido,Silicon p+n junctions with a porous layer for NO2 detection, IMCS11, pp 1-2, Brescia- Italia, tot. autori 5,2006
  7. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, STRAMBINI LUCANOS MARSILIO,A p+n diode with a lateral porous layer as gas sensor, Porous Semiconductors - Science and Technology, pp 97-98, Sitges- Barcelona (Spain),vol. 1, tot. autori 3,2006
  8. BARILLARO GIUSEPPE, DILIGENTI ALESSANDRO, STRAMBINI LUCANOS MARSILIO,A study on the pattern dependance of electrochemically etched structures on n-type substrates, Porous Semiconductor Science and Technology, pp 346-347, MAllorca - Spain,2008
  9. BACCI NATANAELE, BARILLARO GIUSEPPE, PIOTTO MASSIMO, DILIGENTI ALESSANDRO,Current transport in free-standing porous silicon membranes, Porous Semiconductors Sience and Technology 2008, pp 196-197, Mallorca, Spain,vol. 1,2008