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A micromachined bistable 1*2 switch for optical fibers

autori
F. Pieri M. Piotto
anno
2000
tipo prodotto
Articolo in rivista
rivista
Microelectronic Engineering
isbn-issn
0167-9317
tipo indicizzazione
alt
lingua
inglese
volume/numero rivista
53
numero pagine
0
pagina iniziale
565
numero
1-4
ABSTRACT
Using bulk micromachining techniques, a 1x2 optical fiber switch has been fabricated. The optical signal is carried by a standard monomodal fiber. Switching is based on asymmetrical Joule heating of a Y-shaped cantilever structure by means of two integrated chromium thin film resistors; both electrical and optical properties are promising. A lock-release mechanism, based on silicon micromachined hooks, has also been tested. This mechanism allows the fabrication of a mechanically bistable device, that needs electrical power only during switching.
schede autori
PIERI FRANCESCO